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Patent Assignment Abstract of Title
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Total Assignments: 2
Patent #:
NONE
Issue Dt:
Application #:
17782696
Filing Dt:
06/06/2022
Publication #:
20230010985
Pub Dt:
01/12/2023
Inventors:
Pooriya Beyhaghi, Charles Edward Kinney, Bob Rollinger, Joshua Mark Lukens
Title:
SOURCE MATERIAL DELIVERY SYSTEM, EUV RADIATION SYSTEM, LITHOGRAPHIC APPARATUS, AND METHODS THEREOF
Assignment: 1
Reel/Frame:
067206/0209Recorded: 04/24/2024Pages: 4
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
BEYHAGHI, PORRIYA
Exec Dt:
09/02/2020
KINNEY, CHARLES EDWARD
Exec Dt:
08/29/2023
ROLLINGER, BOB
Exec Dt:
10/07/2021
LUKENS, JOSHUA MARK
Exec Dt:
04/15/2024
Assignee:
ASML NETHERLANDS B.V.
P.O. BOX 324
VELDHOVEN, NETHERLANDS 5500 AH
Correspondent:
DIANA DIBERARDINO
P.O. BOX 7126
ALEXANDRIA, VA 22307
Assignment: 2
Reel/Frame:
067234/0986Recorded: 04/25/2024Pages: 7
Conveyance:
CORRECTIVE ASSIGNMENT TO CORRECT THE THE SPELLING OF THE FIRST INVENTOR'S FIRST NAME PREVIOUSLY RECORDED AT REEL: 67206 FRAME: 209. ASSIGNOR(S) HEREBY CONFIRMS THE ASSIGNMENT.
Assignors:
BEYHAGHI, POORIYA
Exec Dt:
09/02/2020
KINNEY, CHARLES EDWARD
Exec Dt:
08/29/2023
ROLLINGER, BOB
Exec Dt:
10/07/2021
LUKENS, JOSHUA MARK
Exec Dt:
04/15/2024
Assignee:
ASML NETHERLANDS B.V.
P.O. BOX 324
VELDHOVEN, NETHERLANDS 5500 AH
Correspondent:
DIANA DIBERARDINO
P.O. BOX 7126
ALEXANDRIA, VA 22307

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