Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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17684876
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Filing Dt:
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03/02/2022
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Publication #:
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Pub Dt:
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01/19/2023
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Inventors:
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Tien-Shun Chang, Yu-Kang Liu, Su-Hao Liu, Huicheng Chang, Yee-Chia Yeo
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Title:
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METHOD FOR ION IMPLANTATION UNIFORMITY CONTROL
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK |
| HSINCHU, TAIWAN 300-78 |
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| SLATER MATSIL, LLP/TSMC |
| 17950 PRESTON ROAD, SUITE 1000 |
| DALLAS, TX 75252 |
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