Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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17959142
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Filing Dt:
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10/03/2022
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Publication #:
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Pub Dt:
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02/02/2023
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Inventors:
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Xuemei Chen, Roel Gronheid
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Title:
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SYSTEM AND METHOD FOR FOCUS CONTROL IN EXTREME ULTRAVIOLET LITHOGRAPHY SYSTEMS USING A FOCUS-SENSITIVE METROLOGY TARGET
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| ONE TECHNOLOGY DRIVE |
| MILPITAS, CALIFORNIA 95035 |
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| SUITER SWANTZ/KLA JOINT CUSTOMER NUMBER |
| SUITER SWANTZ PC LLO |
| 14301 FNB PARKWAY, SUITE 220 |
| OMAHA, NE 68154 |
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