Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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07/04/2023
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Application #:
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17892441
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Filing Dt:
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08/22/2022
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Publication #:
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Pub Dt:
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02/09/2023
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Inventors:
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Tao Zhang, Ajit Balakrishna, Upendra V. Ummethala
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Title:
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BODE FINGERPRINTING FOR CHARACTERIZATIONS AND FAILURE DETECTIONS IN PROCESSING CHAMBER
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3050 BOWERS AVENUE |
| SANTA CLARA, CALIFORNIA 95054 |
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| LOWENSTEIN SANDLER LLP |
| ONE LOWENSTEIN DRIVE |
| ROSELAND, NJ 07068 |
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