Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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17969878
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Filing Dt:
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10/20/2022
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Publication #:
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Pub Dt:
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02/09/2023
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Inventors:
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Takashi YAMAUCHI, Shinichiro KAWAKAMI, Masashi ENOMOTO
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Title:
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METHOD FOR FORMING MASK PATTERN, STORAGE MEDIUM, AND APPARATUS FOR PROCESSING SUBSTRATE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU |
| TOKYO, JAPAN 1076325 |
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| NATH, GOLDBERG & MEYER |
| 112 S WEST STREET |
| 38043UY_JLM_HJ |
| ALEXANDRIA, VA 22314 |
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