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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
NONE
Issue Dt:
05/07/2024
Application #:
17983131
Filing Dt:
11/08/2022
Publication #:
Pub Dt:
03/02/2023
Inventors:
Yoshitomo HASHIMOTO, Kimihiko NAKATANI, Masaya NAGATO, Tomiyuki SHIMIZU et al
Title:
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM
Assignment: 1
Reel/Frame:
062036/0247Recorded: 12/09/2022Pages: 11
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
07/31/2020
Exec Dt:
07/31/2020
Exec Dt:
07/31/2020
Exec Dt:
08/28/2020
Exec Dt:
08/03/2020
Exec Dt:
09/04/2020
Exec Dt:
08/28/2020
Assignee:
3-4, KANDAKAJI-CHO
CHIYODA-KU
TOKYO, JAPAN 101-0045
Correspondent:
VOLPE KOENIG
30 SOUTH 17TH STREET, 18TH FLOOR
PHILADELPHIA, PA 19103

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