Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/09/2024
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Application #:
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18075181
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Filing Dt:
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12/05/2022
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Publication #:
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Pub Dt:
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03/30/2023
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Inventors:
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Shih-Yu TU, Shao-Hua WANG, Chueh-Chi KUO, Li-Jui CHEN, Heng-Hsin LIU, Yen-Hao LIU
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Title:
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HIGHLY EFFICIENT AUTOMATIC PARTICLE CLEANER METHOD FOR EUV SYSTEMS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK |
| HSINCHU, TAIWAN 300 |
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| MCDERMOTT WILL & EMERY LLP |
| 500 NORTH CAPITOL STREET, NW |
| WASHINGTON, DC 20001 |
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05/14/2024 10:21 PM
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