Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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16979671
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Filing Dt:
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09/10/2020
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Publication #:
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Pub Dt:
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03/30/2023
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Inventors:
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Kazuhiro Ueda, Kazuyuki Ikenaga, Masaru Kurihara, Tomoyuki Tamura
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Title:
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MANUFACTURING METHOD AND INSPECTION METHOD OF INTERIOR MEMBER OF PLASMA PROCESSING APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 17-1, TORANOMON 1-CHOME |
| MINATO-KU, TOKYO, JAPAN 1056409 |
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| MILES & STOCKBRIDGE |
| 1751 PINNACLE DRIVE, SUITE 1500 |
| TYSONS CORNER, VA 22102-3833 |
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