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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
NONE
Issue Dt:
Application #:
17962009
Filing Dt:
10/07/2022
Publication #:
Pub Dt:
04/13/2023
Inventors:
Junwei Su, Jiwen Xiang, Shujin Huang, Loc Vinh Tran, Wentao Wang, Xing Lin
Title:
SYSTEMS AND METHODS FOR PURGING REACTOR LOWER CHAMBERS WITH ETCHANTS DURING FILM DEPOSITION
Assignment: 1
Reel/Frame:
061672/0331Recorded: 11/07/2022Pages: 8
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
09/28/2022
Exec Dt:
10/24/2022
Exec Dt:
09/28/2022
Exec Dt:
10/10/2022
Exec Dt:
10/05/2022
Exec Dt:
11/06/2022
Assignee:
VERSTERKERSTRAAT 8
ALMERE, NETHERLANDS 1322 AP
Correspondent:
PATRICK LEE
3440 E. UNIVERSITY DRIVE
PHOENIX, AZ 85034

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