Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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17915282
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Filing Dt:
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09/28/2022
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Publication #:
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Pub Dt:
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05/04/2023
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Inventors:
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Toshihide YOSHIDA, Tomohiro NAKATA, Yuya SUZUKI, Tsutomu SHINOHARA, Ryutaro TANNO
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Title:
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VALVE SYSTEM, OUTPUT MONITORING METHOD AND OUTPUT ADJUSTING METHOD FOR DIAPHRAGM VALVE, AND SEMICONDUCTOR MANUFACTURING APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-2, ITACHIBORI 2-CHOME, NISHI-KU, OSAKA-CITY |
| OSAKA, JAPAN 5500012 |
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| GREENBLUM & BERNSTEIN, P.L.C. |
| 1950 ROLAND CLARKE PLACE |
| RESTON, VA 20191 |
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