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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
NONE
Issue Dt:
Application #:
17976513
Filing Dt:
10/28/2022
Publication #:
Pub Dt:
05/04/2023
Inventors:
Atsushi KAWABATA, Yasuhisa KUDO, Shingo KOIWA
Title:
SUBSTRATE SUPPORT, PLASMA PROCESSING APPARATUS, AND PLASMA PROCESSING METHOD
Assignment: 1
Reel/Frame:
061980/0647Recorded: 12/05/2022Pages: 8
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
11/22/2022
Exec Dt:
11/14/2022
Exec Dt:
11/29/2022
Assignee:
3-1 AKASAKA 5-CHOME, MINATO-KU
TOKYO, JAPAN 107-6325
Correspondent:
WEIHROUCH IP
1737 KING STREET
SUITE 200
ALEXANDRIA, VA 22314

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