Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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17525511
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Filing Dt:
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11/12/2021
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Publication #:
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Pub Dt:
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05/18/2023
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Inventors:
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Nilabh K. Roy, Mario Johannes Meissl
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Title:
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METHOD FOR IMPROVING ACCURACY OF IMPRINT FORCE APPLICATION IN IMPRINT LITHOGRAPHY
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 30-2, SHIMOMARUKO 3-CHOME, OHTA-KU |
| TOKYO, JAPAN 146-8501 |
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| CANON U.S.A. INC. INTELLECTUAL PROPERTY |
| 15975 ALTON PARKWAY |
| IRVINE, CA 92618-3731 |
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