Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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17847406
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Filing Dt:
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06/23/2022
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Publication #:
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Pub Dt:
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05/18/2023
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Inventors:
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Donghyeon NA, Kyungsun Kim, Soonam Park, Seungbo Shim, Janggyoo Yang
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Title:
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PLASMA PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE BY USING SAME
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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129, SAMSUNG-RO, YEONGTONG-GU, GYEONGGI-DO |
SUWON-SI, KOREA, REPUBLIC OF 16677 |
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SUGHRUE MION, PLLC |
2000 PENNSYLVANIA AVENUE, N.W. |
SUITE 9000 |
WASHINGTON, DC 20006 |
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05/06/2024 02:51 AM
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