Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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18104522
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Filing Dt:
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02/01/2023
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Publication #:
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Pub Dt:
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06/08/2023
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Inventors:
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Takamitsu TAKAYAMA, Junichi SASAKI
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Title:
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METHOD OF CLEANING STAGE IN PLASMA PROCESSING APPARATUS, AND THE PLASMA PROCESSING APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-1, AKASAKA 5-CHOME, MINATO-KU |
| TOKYO, JAPAN 1076325 |
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| NATH, GOLDBERG & MEYER |
| 112 S. WEST ST. |
| 38404UY_JLM/ALS |
| ALEXANDRIA, VA 22314 |
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