Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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17996098
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Filing Dt:
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10/13/2022
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Publication #:
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Pub Dt:
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06/22/2023
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Inventors:
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Yousuke ONO, Ryohei OGAWA, Kazuo KOHMURA, Yuichi KATO, Ying ZHOU, Hisako ISHIKAWA et al
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Title:
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PELLICLE FILM FOR PHOTOLITHOGRAPHY, PELLICLE, PHOTOLITHOGRAPHY MASK, PHOTOLITHOGRAPHY SYSTEM, AND METHOD OF PRODUCING PELLICLE FILM FOR PHOTOLITHOGRAPHY
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 5-2, HIGASHI-SHIMBASHI 1-CHOME |
| MINATO-KU, TOKYO, JAPAN 105-7122 |
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| 3-1, KASUMIGASEKI 1-CHOME |
| CHIYODA-KU, TOKYO, JAPAN 100-8921 |
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| BUCHANAN INGERSOLL & ROONEY PC |
| 1737 KING STREET, SUITE 500 |
| ALEXANDRIA, VA 22314-2727 |
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