Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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18147308
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Filing Dt:
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12/28/2022
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Publication #:
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Pub Dt:
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06/29/2023
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Inventors:
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Da-Som BAE, Kyeong Hee KANG, Young Ran KO, Mi Young JO
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Title:
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METHOD AND EQUIPMENT FOR LEAKAGE TESTING OF ELECTROSTATIC CHUCK
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 77, 4SANDAN 5-GIL, JIKSAN-EUP, SEOBUK-GU |
| CHEONAN-SI, CHUNGCHEONGNAM-DO, KOREA, REPUBLIC OF |
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| HARNESS, DICKEY & PIERCE, P.L.C. |
| P.O. BOX 8910 |
| RESTON, VA 20195 |
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