Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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18180615
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Filing Dt:
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03/08/2023
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Publication #:
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Pub Dt:
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07/13/2023
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Inventors:
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Masaaki UENO, Masashi SUGISHITA, Hideto YAMAGUCHI, Seiya SHIGEMATSU, Shuhei MAEDA
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Title:
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TEMPERATURE CONTROL METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM AND SUBSTRATE PROCESSING APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-4, KANDAKAJI-CHO, CHIYODA-KU |
| TOKYO, JAPAN 1010045 |
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| EDELL, SHAPIRO & FINNAN, LLC |
| 9801 WASHINGTONIAN BOULEVARD |
| SUITE 750 |
| GAITHERSBURG, MD 20878 |
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