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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
NONE
Issue Dt:
Application #:
18175104
Filing Dt:
02/27/2023
Publication #:
Pub Dt:
07/13/2023
Inventors:
Toan Q. Tran, Zilu Weng, Dmitry Lubomirsky, Satoru Kobayashi, Tae Seung Cho, Soonam Park et al
Title:
LOW TEMPERATURE CHUCK FOR PLASMA PROCESSING SYSTEMS
Assignment: 1
Reel/Frame:
063957/0614Recorded: 06/15/2023Pages: 5
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
02/24/2015
Exec Dt:
02/27/2015
Exec Dt:
02/24/2015
Exec Dt:
02/27/2015
Exec Dt:
02/25/2015
Exec Dt:
02/24/2015
Exec Dt:
02/27/2015
Exec Dt:
02/24/2015
Assignee:
3050 BOWERS AVENUE
SANTA CLARA, CALIFORNIA 95054
Correspondent:
KILPATRICK TOWNSEND LLP
1400 WEWATTA STREET
DENVER, CO 80202

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