Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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18173048
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Filing Dt:
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02/22/2023
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Publication #:
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Pub Dt:
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08/03/2023
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Inventors:
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Akihiko OHTSU, Yukihisa Kawada, Naotsugu Muro, Masahiro Yoshidome, Tetsuya Kamimura et al
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Title:
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METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, METHOD OF WASHING SEMICONDUCTOR MANUFACTURING APPARATUS, AND METHOD OF MEASURING CLEANLINESS OF WASHING SOLUTION
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 26-30, NISHIAZABU 2-CHOME, MINATO-KU, |
| TOKYO, JAPAN 106-8620 |
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| JCIPRNET |
| 8F-1, NO. 100, ROOSEVELT RD. SEC. 2, |
| TAIPEI, 100404 TAIWAN |
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