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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
NONE
Issue Dt:
Application #:
18186997
Filing Dt:
03/21/2023
Publication #:
20230307267
Pub Dt:
09/28/2023
Inventors:
Katsuhiko YAMAMOTO, Shuhei SAIDO, Takashi NAKAGAWA, Shinya SASAKI, Yoshihiko YANAGISAWA et al
Title:
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM
Assignment: 1
Reel/Frame:
063120/0253Recorded: 03/21/2023Pages: 32
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
YAMAMOTO, KATSUHIKO
Exec Dt:
02/20/2023
SAIDO, SHUHEI
Exec Dt:
02/20/2023
NAKAGAWA, TAKASHI
Exec Dt:
03/16/2023
YANAGISAWA, YOSHIHIKO
Exec Dt:
03/09/2023
SASAKI, SHINYA
Exec Dt:
02/17/2023
MICHITA, NORIAKI
Exec Dt:
03/16/2023
Assignee:
KOKUSAI ELECTRIC CORPORATION
3-4, KANDAKAJI-CHO
CHIYODA-KU
TOKYO, JAPAN 1010045
Correspondent:
VOLPE KOENIG
30 SOUTH 17TH STREET, 18TH FLOOR
PHILADELPHIA, PA 19103

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