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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
NONE
Issue Dt:
Application #:
18023162
Filing Dt:
02/24/2023
Publication #:
Pub Dt:
10/12/2023
Inventors:
Earl William EBERT, Roxana REZVANI NARAGHI
Title:
LITHOGRAPHIC APPARATUS, METROLOGY SYSTEM, AND INTENSITY IMBALANCE MEASUREMENT FOR ERROR CORRECTION
Assignment: 1
Reel/Frame:
062800/0071Recorded: 02/24/2023Pages: 4
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
11/29/2020
Exec Dt:
02/23/2021
Assignee:
P.O. BOX 324
VELDHOVEN, NETHERLANDS 5500 AH
Correspondent:
STERNE, KESSLER, GOLDSTEIN & FOX P.L.L.C
1100 NEW YORK AVENUE, N.W.
WASHINGTON, DC 20005

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