Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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17742637
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Filing Dt:
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05/12/2022
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Publication #:
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Pub Dt:
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11/16/2023
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Inventors:
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Che Wei Yang, Chih Cheng Shih, Sheng-Chan Li, Cheng-Yuan Tsai, Sheng-Chau Chen
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Title:
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TUNABLE PLASMA EXCLUSION ZONE IN SEMICONDUCTOR FABRICATION
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 8, LI-HSIN ROAD 6, |
| HSIN-CHU SCIENCE PARK |
| HSIN-CHU, TAIWAN 300-78 |
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| COOPER LEGAL GROUP LLC |
| 1388 RIDGE ROAD, UNIT 1 |
| HINCKLEY, 44233 UNITED STATES |
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