Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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18332233
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Filing Dt:
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06/09/2023
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Publication #:
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Pub Dt:
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12/21/2023
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Inventors:
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Kyungseok MIN, Hyunjong SHIM, Sangmin MUN, Sunjoo PARK, Hwan JUNG, Nayeon LEE
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Title:
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ETCHING GAS COMPOSITION, SUBSTRATE PROCESSING APPARATUS, AND PATTERN FORMING METHOD USING THE ETCHING GAS COMPOSITION
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 77, 4SANDAN 5-GIL, JIKSAN-EUP |
| SEOBUK-GU, CHEONAN-SI |
| CHUNGCHEONGNAM-DO, KOREA, REPUBLIC OF 31040 |
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| CARTER, DELUCA & FARRELL LLP |
| 576 BROAD HOLLOW ROAD |
| MELVILLE, NY 11747 |
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05/12/2024 08:42 AM
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