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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
NONE
Issue Dt:
Application #:
18210338
Filing Dt:
06/15/2023
Publication #:
20230422348
Pub Dt:
12/28/2023
Inventors:
Yasuaki KIKUCHI, Tatsuya YAMAGUCHI, SungDuk SON, Miki OUCHI, Nobuyuki HIROTA et al
Title:
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Assignment: 1
Reel/Frame:
063963/0452Recorded: 06/15/2023Pages: 14
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
KIKUCHI, YASUAKI
Exec Dt:
06/09/2023
YAMAGUCHI, TATSUYA
Exec Dt:
06/12/2023
SON, SUNGDUK
Exec Dt:
05/30/2023
OUCHI, MIKI
Exec Dt:
05/29/2023
HIROTA, NOBUYUKI
Exec Dt:
05/29/2023
HISHIYA, SHINGO
Exec Dt:
05/29/2023
Assignee:
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU
TOKYO, JAPAN 107-6325
Correspondent:
VENJURIS, P.C.
1938 E OSBORN RD
PHOENIX, AZ 85016

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