Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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18085371
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Filing Dt:
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12/20/2022
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Publication #:
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Pub Dt:
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01/18/2024
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Inventors:
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Zuoming ZHU, Shu-Kwan LAU, Manjunath SUBBANNA, Chia Cheng CHIN, Ala MORADIAN, John TOLLE et al
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Title:
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FLOW GUIDE STRUCTURES AND HEAT SHIELD STRUCTURES, AND RELATED METHODS, FOR DEPOSITION UNIFORMITY AND PROCESS ADJUSTABILITY
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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3050 BOWERS AVENUE |
SANTA CLARA, CALIFORNIA 95054 |
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PATTERSON + SHERIDAN, LLP |
24 GREENWAY PLAZA, SUITE 1600 |
HOUSTON, TX 77046 |
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04/27/2024 11:50 PM
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