Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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18198482
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Filing Dt:
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05/17/2023
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Publication #:
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Pub Dt:
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01/18/2024
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Inventors:
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Yeon Tae KIM, Hun Yong PARK, Yihwan KIM, Ji Hoon KIM, Kee Soo PARK
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Title:
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SUBSTRATE TEMPERATURE MEASURING DEVICE, SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME, AND SUBSTRATE TEMPERATURE MEASURING METHOD USING THE SAME
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 129, SAMSUNG-RO, YEONGTONG-GU |
| SUWON-SI, GYEONGGI-DO, KOREA, REPUBLIC OF 16677 |
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| EUGENE M LEE |
| LEE IP LAW, P.C. |
| 3141 FAIRVIEW PARK DRIVE, SUITE 500 |
| FALLS CHURCH, VA 22042 |
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05/11/2024 09:46 AM
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