Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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18381269
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Filing Dt:
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10/18/2023
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Publication #:
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Pub Dt:
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02/08/2024
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Inventor:
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Hajime TAMURA
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Title:
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SUBSTRATE STAGE, SUBSTRATE PROCESSING APPARATUS, AND TEMPERATURE CONTROL METHOD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-1 AKASAKA 5-CHOME, MINATO-KU |
| TOKYO, JAPAN 1076325 |
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| NATH, GOLDBERG & MEYER |
| 112 S WEST STREET |
| 38179UYY_JLM_HJ |
| ALEXANDRIA, VA 22314 |
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