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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
NONE
Issue Dt:
Application #:
18136739
Filing Dt:
04/19/2023
Publication #:
20240085321
Pub Dt:
03/14/2024
Inventors:
John Hench, Akshay Krishna, Christopher Liman, Jeremy Smith, Liang Yin, Hyowon Park et al
Title:
Methods And Systems For Model-less, Scatterometry Based Measurements Of Semiconductor Structures
Assignment: 1
Reel/Frame:
063648/0487Recorded: 05/16/2023Pages: 9
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
CHEN, BOXUE
Exec Dt:
04/27/2023
HENCH, JOHN
Exec Dt:
05/02/2023
KRISHNA, AKSHAY
Exec Dt:
04/27/2023
LIMAN, CHRISTOPHER
Exec Dt:
04/27/2023
SMITH, JEREMY
Exec Dt:
04/26/2023
PARK, HYOWON
Exec Dt:
04/26/2023
WANG, TIANHAN
Exec Dt:
05/15/2023
YIN, LIANG
Exec Dt:
04/27/2023
Assignee:
KLA CORPORATION
ONE TECHNOLOGY DRIVE
MILPITAS, CALIFORNIA 95035
Correspondent:
SPANO LAW GROUP
851 BURLWAY ROAD
SUITE 407
BURLINGAME, CA 94010

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