Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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18479599
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Filing Dt:
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10/02/2023
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Publication #:
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Pub Dt:
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04/04/2024
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Inventors:
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Ryo MATSUBARA, Atsushi TAKAHASHI, Yuta NAKANE, Noboru SAITO
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Title:
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ETCHING METHOD AND PLASMA PROCESSING SYSTEM
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-1, AKASAKA 5-CHOME |
| MINATO-KU, TOKYO, JAPAN 107-6325 |
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| PROCOPIO, CORY, HARGREAVES & SAVITCH LLP |
| 525 B STREET, SUITE 2200 |
| SAN DIEGO, CA 92101 |
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04/30/2024 12:21 PM
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