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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
NONE
Issue Dt:
Application #:
18416026
Filing Dt:
01/18/2024
Publication #:
Pub Dt:
05/09/2024
Inventors:
Choong-Man Lee, Soo Doo Chae, Angelique Raley, Qiaowei Lou, Toshio Hasegawa et al
Title:
EXTREME ULTRAVIOLET LITHOGRAPHY PATTERNING METHOD
Assignment: 1
Reel/Frame:
066704/0399Recorded: 03/08/2024Pages: 10
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
09/09/2021
Exec Dt:
08/17/2021
Exec Dt:
08/17/2021
Exec Dt:
08/18/2021
Exec Dt:
08/30/2021
Exec Dt:
09/03/2021
Assignee:
AKASAKA BIZ TOWER
3-1 AKASAKA 5-CHOME, MINATO-KU
TOKYO, JAPAN 107-6325
Correspondent:
SLATER MATSIL, LLP
17950 PRESTON ROAD, SUITE 1000
DALLAS, TX 75252

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