Patent Assignment Details
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| Reel/Frame: | 003994/0035 | |
| Pages: | 2 |
| | Recorded: | 05/04/1982 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST. |
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Total properties:
1
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Patent #:
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Issue Dt:
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09/04/1984
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Application #:
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06374724
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Filing Dt:
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05/04/1982
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Title:
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ELECTRON BEAM PATTERN TRANSFER DEVICE AND METHOD FOR ALIGNING MASK AND SEMICONDUCTOR WAFER
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Assignee
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| 72 HORIKAWA-CHO, SAIWAI-KU, KAWASAKI-SHI |
| A CORP. OF JAPAN |
| KANAGAWA-KEN, JAPAN |
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Correspondence name and address
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SCHUYLER, BIRCH, MC KIE & BECKETT
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1000 CONN. AVE.
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WASHINGTON, DC 20036
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