Patent Assignment Details
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| Reel/Frame: | 003997/0818 | |
| Pages: | 2 |
| | Recorded: | 06/04/1982 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST. |
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Total properties:
1
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Patent #:
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Issue Dt:
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12/20/1983
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Application #:
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06349742
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Filing Dt:
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02/18/1982
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Title:
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BEAM SCANNING METHOD AND APPARATUS FOR ION IMPLANTATION
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Correspondence name and address
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WILLIAM R.MCCLELLAN
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VARIAN/EXTRION DIVISION
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BLACKBURN INDUSTRIAL PARK
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GLOUCESTER, MASS 01930
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