Patent Assignment Details
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| Reel/Frame: | 004154/0969 | |
| Pages: | 2 |
| | Recorded: | 04/08/1983 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST. |
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Total properties:
1
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Patent #:
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Issue Dt:
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05/14/1985
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Application #:
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06483131
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Filing Dt:
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04/08/1983
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Title:
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METHOD OF BACKSIDE HEATING A SEMICONDUCTOR SUBSTRATE IN AN ENACUATED CHAMBER BY DIRECTED MICROWAVES FOR VACUUM TREATING AND HEATING A SEMICONDUCTOR SUBSTRATE
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Assignee
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| 1015 KAMIKODANAKA NAKAHARA KU |
| JAPAN CORP |
| KAWASAKI SHI, KANAGAWA 211, JAPAN |
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Correspondence name and address
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STAAS & HALSEY
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1825 K STREET, N. W.
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WASHINGTON, DC 20006
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