Patent Assignment Details
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| Reel/Frame: | 004225/0681 | |
| Pages: | 1 |
| | Recorded: | 01/30/1984 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST. |
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Total properties:
1
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Patent #:
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Issue Dt:
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04/16/1985
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Application #:
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06575118
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Filing Dt:
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01/30/1984
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Title:
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CONTROL OF ETCH RATE RATIO OF SIO2/PHOTORESIST FOR QUARTZ PLANARIZATION ETCH BACK PROCESS
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Assignee
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| A CORP NY |
| ARMONK, NEW YORK 10504 |
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Correspondence name and address
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JOSEPH E. KIENINGER
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IBM PAT. OPERS. (951/123)
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5600 COTTLE ROAD
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SAN JOSE, CA 95193
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