Patent Assignment Details
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Reel/Frame: | 004625/0403 | |
| Pages: | 2 |
| | Recorded: | 10/17/1986 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST. |
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Total properties:
1
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Patent #:
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Issue Dt:
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10/06/1987
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Application #:
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06898081
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Filing Dt:
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08/20/1986
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Title:
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METHOD FOR PRODUCING DEEP-ETCH, X-RAY LITHOGRAPHY MASKS
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Assignee
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PATENTABTEILUNG, WEBERSTRASSE 5 |
D-7500 KARLSRUHE 1, GERMANY |
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Correspondence name and address
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SPENCER & FRANK
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1111 - 19TH ST., N. W.
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WASHINGTON, DC 20036
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