Patent Assignment Details
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Reel/Frame: | 004796/0059 | |
| Pages: | 2 |
| | Recorded: | 07/10/1987 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST. |
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Total properties:
1
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Patent #:
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Issue Dt:
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01/10/1989
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Application #:
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07049254
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Filing Dt:
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05/13/1987
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Title:
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PLASMA ETCH ENHANCEMENT WITH LARGE MASS INERT GAS
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Correspondence name and address
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ELMER W. GALBI
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IBM INTELLECTUAL PROPERTY LAW N50/251-2
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1701 NORTH ST.
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ENDICOTT, NY 13760
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