Patent Assignment Details
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| Reel/Frame: | 004810/0698 | |
| Pages: | 3 |
| | Recorded: | 10/20/1987 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST. |
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Total properties:
1
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Patent #:
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Issue Dt:
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03/28/1989
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Application #:
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07110253
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Filing Dt:
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10/20/1987
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Title:
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SINGLE SLICE PROCESSING APPARATUS WITH BATCH PROCESSING LOAD-LOCK CHAMBER FOR HEATING THE SUBSTRATES AND PLASMA PROCESSING
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Correspondence name and address
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POLLOCK, VANDE SANDE & PRIDDY
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POST OFFICE BOX 19088
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WASHINGTON, DC 20036
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