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Reel/Frame:004824/0864   Pages: 1
Recorded: 01/26/1988
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST.
Total properties: 1
1
Patent #:
Issue Dt:
12/26/1989
Application #:
07148691
Filing Dt:
01/26/1988
Title:
APPARATUS WITH FOUR LIGHT DETECTORS FOR CHECKING SURFACE OF MASK WITH PELLICLE
Assignors
1
Exec Dt:
01/25/1988
2
Exec Dt:
01/25/1988
3
Exec Dt:
01/25/1988
4
Exec Dt:
01/25/1988
Assignee
1
2-3, MARUNOUCHI 3-CHOME, CHIYODA-KU
TOKYO, JAPAN
Correspondence name and address
SHAPIRO AND SHAPIRO
1100 WILSON BOULEVARD
SUITE 1701
ARLINGTON, VA 22209

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