Patent Assignment Details
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Reel/Frame: | 005071/0036 | |
| Pages: | 1 |
| | Recorded: | 04/17/1989 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST. |
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Total properties:
1
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Patent #:
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Issue Dt:
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08/07/1990
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Application #:
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07338855
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Filing Dt:
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04/17/1989
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Title:
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DRY ETCHING METHOD FOR SEMICONDUCTOR
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Assignees
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ZENJIRO HASE 1, NAGAHATA, OCHIAI |
HARUHI-MURA, NISHIKASUGAI-GUN |
AICHI-KEN, 452, JAPAN |
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NOBORU KOMATSU, 41-1, AZA |
YOKOMICHI, OAZA NAGAKUTE, NAGAKUTE-CHO, AICHI-GUN |
AICHI-KEN, 480-11, JAPAN |
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NOBUHISA AKABANE 5-2 |
NAGAHATA-CHO 2-CHOME, CHIYODA-KU |
TOKYO, 100, JAPAN |
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Correspondence name and address
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CUSHMAN, DARBY & CUSHMAN
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1615 L STREET, N.W., ELEVENTH FLOOR
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WASHINGTON, DC 20036
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