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Total properties:
17
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Patent #:
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Issue Dt:
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05/17/1983
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Application #:
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06203735
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Filing Dt:
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11/03/1980
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Title:
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AUTO-ZERO SYSTEM FOR PRESSURE TRANSDUCERS
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Patent #:
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Issue Dt:
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07/27/1982
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Application #:
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06219060
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Filing Dt:
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12/22/1980
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Title:
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LOAD-LOCK VACUUM CHAMBER
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Patent #:
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Issue Dt:
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12/21/1982
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Application #:
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06223197
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Filing Dt:
|
01/07/1981
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Title:
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MOLAR GAS-FLOW CONTROLLER
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Patent #:
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Issue Dt:
|
02/22/1983
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Application #:
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06235784
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Filing Dt:
|
02/19/1981
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Title:
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AUTOMATIC IMPEDEDANCE MATCHING BETWEEN SOURCE AND LOAD
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Patent #:
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Issue Dt:
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11/15/1983
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Application #:
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06250375
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Filing Dt:
|
04/02/1981
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Title:
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END-POINT DETECTION IN PLASMA ETCHING OF PHOSPHOSILICATE GLASS
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Patent #:
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Issue Dt:
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01/10/1984
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Application #:
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06255415
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Filing Dt:
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04/20/1981
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Title:
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WAFER ALIGNERS
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Patent #:
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Issue Dt:
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01/04/1983
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Application #:
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06260668
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Filing Dt:
|
05/06/1981
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Title:
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HIGH SPEED PLASMA ETCHING SYSTEM
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Patent #:
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Issue Dt:
|
01/11/1983
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Application #:
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06290270
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Filing Dt:
|
08/05/1981
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Title:
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APPARATUS FOR THE ETCHING FOR SEMICONDUCTOR DEVICES
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Patent #:
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Issue Dt:
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02/14/1984
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Application #:
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06298416
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Filing Dt:
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09/01/1981
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Title:
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INDUCTIVELY COUPLED DISCHARGE FOR PLASMA ETCHING AND RESIST STRIPPING
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Patent #:
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Issue Dt:
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10/04/1983
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Application #:
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06338752
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Filing Dt:
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01/11/1982
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Title:
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PROFILE CONTROL PHOTORESIST
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Patent #:
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Issue Dt:
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10/30/1984
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Application #:
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06406625
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Filing Dt:
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08/09/1982
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Title:
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REGENERABLE COLD TRAP FOR ALUMINUM CHLORIDE EFFLUENT
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Patent #:
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Issue Dt:
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04/23/1985
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Application #:
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06444563
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Filing Dt:
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11/26/1982
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Title:
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PNEUMATIC CONTROL VALVE MANIFOLD INTERFACE
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Patent #:
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Issue Dt:
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11/04/1986
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Application #:
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06590933
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Filing Dt:
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03/19/1984
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Title:
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R.F. IMPEDANCE MATCH CONTROL SYSTEM
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|
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Patent #:
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Issue Dt:
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10/14/1986
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Application #:
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06722623
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Filing Dt:
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04/12/1985
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Title:
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PLASMA ETCHING SYSTEM
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|
|
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Patent #:
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Issue Dt:
|
12/02/1986
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Application #:
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06748291
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Filing Dt:
|
06/24/1985
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Title:
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PLASMA ETCHING SYSTEM FOR MINIMIZING STRAY ELECTRICAL DISCHARGES
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|
|
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Patent #:
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|
Issue Dt:
|
09/16/1986
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Application #:
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06759819
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Filing Dt:
|
07/29/1985
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|
Title:
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ELECTRODE FOR PLASMA ETCHING SYSTEM
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|
|
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Patent #:
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Issue Dt:
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10/07/1986
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Application #:
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06763165
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Filing Dt:
|
08/07/1985
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Title:
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WAFER COOLING AND TEMPERATURE CONTROL FOR A PLASMA ETCHING SYSTEM
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