Patent Assignment Details
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Reel/Frame: | 005151/0648 | |
| Pages: | 1 |
| | Recorded: | 10/05/1989 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST. |
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Total properties:
1
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Patent #:
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Issue Dt:
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10/08/1991
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Application #:
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07418548
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Filing Dt:
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10/05/1989
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Title:
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METHOD AND APPARATUS FOR ENHANCING ILLUMINATION UNIFORMITY IN WAFER STEPPERS USING PHOTOCHROMIC GLASS IN THE OPTICAL PATH
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Assignee
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1551 MCCARTHY BLVD. |
MILPITAS, CALIFORNIA 95035 |
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Correspondence name and address
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GERALD E. LINDEN
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11 VINCENT DR.
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MONROE, CT 06468
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