Patent Assignment Details
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| Reel/Frame: | 005274/0403 | |
| Pages: | 1 |
| | Recorded: | 04/16/1990 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST. |
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Total properties:
1
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Patent #:
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Issue Dt:
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03/16/1993
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Application #:
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07485058
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Filing Dt:
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02/22/1990
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Title:
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METHOD OF ANISOTROPIC DRY ETCHING OF THIN FILM SEMICONDUCTORS
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Assignee
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| 3-5, OWA 3-CHOME, SUWA-SHI, |
| NAGANO-KEN,, JAPAN 392 |
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Correspondence name and address
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THOMAS SCHNECK
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P.O. BOX 2-E
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111 WEST ST. JOHN STREET
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STE. 620
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SAN JOSE, CA 95109-0005
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