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Patent Assignment Details

NOTE:Results display only for issued patents and published applications. For pending or abandoned applications please consult USPTO staff.

Reel/Frame:	005439/0781			Pages:	5
		Recorded:	08/09/1990
Conveyance:	ASSIGNMENT OF ASSIGNORS INTEREST.

Total properties: 41

Patent #:	4264393	Issue Dt:	04/28/1981	Application #:	05847349	Filing Dt:	10/31/1977
Title:	REACTOR APPARATUS FOR PLASMA ETCHING OR DEPOSITION

Patent #:	4209357	Issue Dt:		Application #:	06040604	Filing Dt:
Title:

Patent #:	4263088	Issue Dt:	04/21/1981	Application #:	06051661	Filing Dt:	06/25/1979
Title:	METHOD FOR PROCESS CONTROL OF A PLASMA REACTION

Patent #:	4357195	Issue Dt:	11/02/1982	Application #:	06205402	Filing Dt:	11/10/1980
Title:	APPARATUS FOR CONTROLLING A PLASMA REACTION

Patent #:	4464223	Issue Dt:	08/07/1984	Application #:	06538593	Filing Dt:	10/03/1983
Title:	PLASMA REACTOR APPARATUS AND METHOD

Patent #:	4861222	Issue Dt:	08/29/1989	Application #:	06587860	Filing Dt:	03/09/1984
Title:	CASSETTE ELEVATOR FOR USE IN A MODULAR ARTICLE PROCESSING MACHINE

Patent #:	4632624	Issue Dt:	12/30/1986	Application #:	06588027	Filing Dt:	03/09/1984
Title:	VACUUM LOAD LOCK APPARATUS

Patent #:	4611919	Issue Dt:	09/16/1986	Application #:	06588028	Filing Dt:	03/09/1984
Title:	PROCESS MONITOR AND METHOD THEREOF

Patent #:	4801241	Issue Dt:	01/31/1989	Application #:	06588029	Filing Dt:	03/09/1984
Title:	MODULAR ARTICLE PROCESSING MACHINE AND METHOD OF ARTICLE HANDLING THEREIN

Patent #:	4619573	Issue Dt:	10/28/1986	Application #:	06588030	Filing Dt:	03/09/1984
Title:	ARTICLE TRANSPORT APPARATUS

Patent #:	4547247	Issue Dt:	10/15/1985	Application #:	06588031	Filing Dt:	03/09/1984
Title:	PLASMA REACTOR CHUCK ASSEMBLY

Patent #:	4575714	Issue Dt:	03/11/1986	Application #:	06588823	Filing Dt:	03/12/1984
Title:	MODULE PRESENCE SENSOR

Patent #:	4539062	Issue Dt:	09/03/1985	Application #:	06588853	Filing Dt:	03/12/1984
Title:	MODULAR PLASMA REACTOR WITH LOCAL ATMOSPHERE

Patent #:	4547248	Issue Dt:	10/15/1985	Application #:	06588854	Filing Dt:	03/12/1984
Title:	AUTOMATIC SHUTOFF VALVE

Patent #:	4585920	Issue Dt:	04/29/1986	Application #:	06658468	Filing Dt:	10/09/1984
Title:	PLASMA REACTOR REMOVABLE INSERT

Patent #:	4579618	Issue Dt:	04/01/1986	Application #:	06665098	Filing Dt:	10/29/1984
Title:	PLASMA REACTOR APPARATUS

Patent #:	4590042	Issue Dt:	05/20/1986	Application #:	06685650	Filing Dt:	12/24/1984
Title:	PLASMA REACTOR HAVING SLOTTED MANIFOLD

Patent #:	4585516	Issue Dt:	04/29/1986	Application #:	06707639	Filing Dt:	03/04/1985
Title:	VARIABLE DUTY CYCLE, MULTIPLE FREQUENCY, PLASMA REACTOR

Patent #:	4857138	Issue Dt:	08/15/1989	Application #:	06719783	Filing Dt:	04/03/1985
Title:	SILICON TRENCH ETCH

Patent #:	4614639	Issue Dt:	09/30/1986	Application #:	06727937	Filing Dt:	04/26/1985
Title:	COMPOUND FLOW PLASMA REACTOR

Patent #:	4624728	Issue Dt:	11/25/1986	Application #:	06743341	Filing Dt:	06/11/1985
Title:	PIN LIFT PLASMA PROCESSING

Patent #:	4687543	Issue Dt:	08/18/1987	Application #:	06832047	Filing Dt:	02/21/1986
Title:	SELECTIVE PLASMA ETCHING DURING FORMATION OF INTEGRATED CIRCUITRY

Patent #:	4678540	Issue Dt:	07/07/1987	Application #:	06872073	Filing Dt:	06/09/1986
Title:	PLASMA ETCH PROCESS

Patent #:	4697089	Issue Dt:	09/29/1987	Application #:	06875820	Filing Dt:	06/18/1986
Title:	DUAL WAVELENGTH SENSOR WHICH EMPLOYS OBJECT AS PART OF A CORNER REFLECTOR

Patent #:	4720628	Issue Dt:	01/19/1988	Application #:	06923367	Filing Dt:	10/27/1986
Title:	OPTICAL PROCESS FOR DETERMINING THE END POINT OF A PROCESS VIA ANALOG MULTIPLICATION OF PHOTOCELL SIGNALS

Patent #:	4737235	Issue Dt:	04/12/1988	Application #:	06931006	Filing Dt:	11/17/1986
Title:	PROCESS FOR POLYSILICON WITH FREON 11 AND ANOTHER GAS

Patent #:	4724510	Issue Dt:	02/09/1988	Application #:	06941234	Filing Dt:	12/12/1986
Title:	ELECTROSTATIC WAFER CLAMP

Patent #:	5006760	Issue Dt:	04/09/1991	Application #:	07001773	Filing Dt:	01/09/1987
Title:	CAPACITIVE FEED FOR PLASMA REACTOR

Patent #:	4727993	Issue Dt:	03/01/1988	Application #:	07018770	Filing Dt:	03/02/1987
Title:	WAFER CASSETTS HAVING MULTI-DIRECTIONAL ACCDSS

Patent #:	4790258	Issue Dt:	12/13/1988	Application #:	07034121	Filing Dt:	04/03/1987
Title:	MAGNETICALLY COUPLED WAFER LIFT PINS

Patent #:	4774164	Issue Dt:	09/27/1988	Application #:	07034250	Filing Dt:	04/06/1987
Title:	CHROME MASK ETCH

Patent #:	4793975	Issue Dt:	12/27/1988	Application #:	07045260	Filing Dt:	04/24/1987
Title:	PLASMA REACTOR WITH REMOVABLE INSERT

Patent #:	4780169	Issue Dt:	10/25/1988	Application #:	07048344	Filing Dt:	05/11/1987
Title:	NON-UNIFORM GAS INLET FOR DRY ETCHING APPARATUS

Patent #:	4786359	Issue Dt:	11/22/1988	Application #:	07065746	Filing Dt:	06/24/1987
Title:	XENON ENHANCED PLASMA ETCH

Patent #:	4958658	Issue Dt:	09/25/1990	Application #:	07066801	Filing Dt:	06/25/1987
Title:	MASS FLOW STABILIZER

Patent #:	4867631	Issue Dt:	09/19/1989	Application #:	07185730	Filing Dt:	04/25/1988
Title:	SPATULA FOR WAFER TRANSPORT

Patent #:	5086492	Issue Dt:	02/04/1992	Application #:	07265304	Filing Dt:	10/31/1988
Title:	SWITCHING CURRENT REGULATOR FOR MOTOR CONTROL

Patent #:	4949670	Issue Dt:	08/21/1990	Application #:	07267193	Filing Dt:	11/04/1988
Title:	METHOD AND APPARATUS FOR LOW PRESSURE PLASMA

Patent #:	4888088	Issue Dt:	12/19/1989	Application #:	07319020	Filing Dt:	03/06/1989
Title:	IGNITOR FOR A MICROWAVE SUSTAINED PLASMA

Patent #:	4889588	Issue Dt:	12/26/1989	Application #:	07345795	Filing Dt:	05/01/1989
Title:	PLASMA ETCH ISOTROPY CONTROL

Patent #:	3875068	Issue Dt:		Application #:	UNAVAILABLE	Filing Dt:
Title:

Assignor

TEGAL CORPORATION, A CORP. OF DE

Exec Dt:

12/18/1989

Assignee

MOTOROLA, INC., A DE CORP.

1303 EAST ALGONQUIN ROAD

SCHAUMBURG, ILLINOIS 60196

Correspondence name and address
	PAUL F. WILLE
	MOTOROLA PATENT DEPARTMENT
	SUITE 300K
	4250 E. CAMELBACK ROAD
	PHOENIX, AZ 85023

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