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Patent Assignment Details

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Reel/Frame:	005443/0382			Pages:	34
		Recorded:	07/17/1990
Conveyance:	SECURITY INTEREST (SEE DOCUMENT FOR DETAILS).

Total properties: 36

Patent #:	4227347	Issue Dt:		Application #:	05942268	Filing Dt:
Title:

Patent #:	4217977	Issue Dt:	08/19/1980	Application #:	05942608	Filing Dt:	09/15/1978
Title:	CONVEYOR SYSTEM

Patent #:	4228004	Issue Dt:	10/14/1980	Application #:	06029525	Filing Dt:	04/12/1979
Title:	METHOD AND APPARATUS FOR REMOVAL OF BY-PRODUCTS OF CHEMICAL VAPOR DEPOSITION FROM OIL FOR VACUUM PUMP

Patent #:	4253417	Issue Dt:	03/03/1981	Application #:	06123243	Filing Dt:	02/21/1980
Title:	CLOSURE FOR THERMAL REACTOR

Patent #:	4313266	Issue Dt:	02/02/1982	Application #:	06145867	Filing Dt:	05/01/1980
Title:	METHOD AND APPARATUS FOR DRYING WAFERS

Patent #:	4658855	Issue Dt:	04/21/1987	Application #:	06193876	Filing Dt:	10/03/1980
Title:	MASS FLOW CONTROLLER

Patent #:	4369031	Issue Dt:	01/18/1983	Application #:	06302003	Filing Dt:	09/15/1981
Title:	GAS CONTROL SYSTEM FOR CHEMICAL VAPOR DEPOSITION SYSTEM

Patent #:	4376796	Issue Dt:	03/15/1983	Application #:	06315572	Filing Dt:	10/27/1981
Title:	IMPROVEMENT IN PROCESSING SILICON WAFERS EMPLOYING PROCESSING GAS ATMOSPHERES OF SIMILAR MOLECULAR WEIGHT

Patent #:	4545327	Issue Dt:	10/08/1985	Application #:	06412237	Filing Dt:	08/27/1982
Title:	CHEMICAL VAPOR DEPOSITION APPARATUS

Patent #:	4507078	Issue Dt:	03/26/1985	Application #:	06479197	Filing Dt:	03/28/1983
Title:	WAFER HANDLING APPARATUS AND METHOD

Patent #:	4420385	Issue Dt:	12/13/1983	Application #:	06485556	Filing Dt:	04/15/1983
Title:	APPARATUS AND PROCESS FOR SPUTTER DEPOSITION OF REACHED THIN FILMS

Patent #:	4619840	Issue Dt:	10/28/1986	Application #:	06497321	Filing Dt:	05/23/1983
Title:	PROCESS AND APPARATUS FOR LOW PRESSURE CHEMICAL VAPOR DEPOSITION OF REFRACTORY METAL

Patent #:	4539933	Issue Dt:	09/10/1985	Application #:	06528193	Filing Dt:	08/31/1983
Title:	CHEMICAL VAPOR DEPOSITION APPARATUS

Patent #:	4524719	Issue Dt:	06/25/1985	Application #:	06529415	Filing Dt:	09/06/1983
Title:	SUBSTRATE LOADING MEANS FOR A CHEMICAL VAPOR DEPOSITION APPARATUS

Patent #:	4582020	Issue Dt:	04/15/1986	Application #:	06607065	Filing Dt:	05/04/1984
Title:	CHEMICAL VAPOR DEPOSITION WAFER BOAT

Patent #:	4557950	Issue Dt:	12/10/1985	Application #:	06611793	Filing Dt:	05/18/1984
Title:	PROCESS FOR DEPOSITION OF BOROPHOSPHOSILICATE GLASS

Patent #:	4548159	Issue Dt:	10/22/1985	Application #:	06628542	Filing Dt:	07/06/1984
Title:	CHEMICAL VAPOR DEPOSITION WAFER BOAT

Patent #:	4547404	Issue Dt:	10/15/1985	Application #:	06657313	Filing Dt:	10/02/1984
Title:	HEMICAL VAPOR DEPOSITION PROCESS

Patent #:	4636140	Issue Dt:	01/13/1987	Application #:	06719409	Filing Dt:	04/03/1985
Title:	METHOD OF LOADING AND UNLOADING A FURNACE

Patent #:	4641604	Issue Dt:	02/10/1987	Application #:	06804954	Filing Dt:	12/05/1985
Title:	CHEMICAL VAPOR DEPOSITION WAFER BOAT

Patent #:	4728869	Issue Dt:	03/01/1988	Application #:	06845212	Filing Dt:	03/27/1986
Title:	PULSEWIDTH MODULATED PRESSURE CONTROL SYSTEM FOR CHEMICAL VAPOR DEPOSITION APPARATUS

Patent #:	4934767	Issue Dt:	06/19/1990	Application #:	06863960	Filing Dt:	05/16/1986
Title:	SEMICONDUCTOR WAFER CARRIER INPUT/OUTPUT DRAWER

Patent #:	4722659	Issue Dt:	02/02/1988	Application #:	06863961	Filing Dt:	05/16/1986
Title:	SEMICONDUCTOR WAFER CARRIER TRANSPORT APPARATUS

Patent #:	4728246	Issue Dt:	03/01/1988	Application #:	06863963	Filing Dt:	05/16/1986
Title:	WAFER BOAT TRANSFER TOOL

Patent #:	4770590	Issue Dt:	09/13/1988	Application #:	06864077	Filing Dt:	05/16/1986
Title:	METHOD AND APPARATUS FOR TRANSFERRING WAFERS BETWEEN CASSETTES AND A BOAT

Patent #:	4700595	Issue Dt:	10/20/1987	Application #:	06864078	Filing Dt:	05/16/1986
Title:	BALANCE MECHANISM FOR MOVABLE JAW CHUCK OF A SPIN STATION

Patent #:	4711989	Issue Dt:	12/08/1987	Application #:	06864676	Filing Dt:	05/19/1986
Title:	DIFFUSION FURNACE MULTIZONE TEMPERATURE CONTROL

Patent #:	4726961	Issue Dt:	02/23/1988	Application #:	06874754	Filing Dt:	06/16/1986
Title:	PROCESS FOR LOW PRESSURE CHEMICAL VAPOR DEPOSITION OF REFRACTORY METAL

Patent #:	4692115	Issue Dt:	09/08/1987	Application #:	06880422	Filing Dt:	06/30/1986
Title:	SEMICONDUCTOR WAFER FURNACE DOOR

Patent #:	4684863	Issue Dt:	08/04/1987	Application #:	06880423	Filing Dt:	06/30/1986
Title:	SEMICONDUCTOR WAFER BOAT LOADER CONTROL SYSTEM

Patent #:	4721424	Issue Dt:	01/26/1988	Application #:	06880460	Filing Dt:	06/30/1986
Title:	SEMICONDUCTOR WAFER BOAT LOADER RELEASABLE MOUNTING

Patent #:	4720395	Issue Dt:	01/19/1988	Application #:	06899923	Filing Dt:	08/25/1986
Title:	LOW TEMPERATURE SILICON NITRIDE CVD PROCESS

Patent #:	4711197	Issue Dt:	12/08/1987	Application #:	06919736	Filing Dt:	10/16/1986
Title:	GAS SCAVENGER

Patent #:	4721427	Issue Dt:	01/26/1988	Application #:	07048868	Filing Dt:	05/12/1987
Title:	WAFER TRANSFER STAND

Patent #:	4817557	Issue Dt:	04/04/1989	Application #:	07092967	Filing Dt:	09/04/1987
Title:	PROCESS AND APPARATUS FOR LOW PRESSURE CHEMICAL VAPOR DEPOSITION OF REFRACTORY METAL

Patent #:	4886954	Issue Dt:	12/12/1989	Application #:	07181787	Filing Dt:	04/15/1988
Title:	HOT WALL DIFFUSION FURNACE AND METHOD FOR OPERATING THE FURNACE

Assignor

SILICON VALLEY GROUP, INC.

Exec Dt:

05/15/1990

Assignee

BANK OF AMERICA NATIONAL TRUST AND SAVINGS ASSOCIATION, A NATIONAL BANKING ASSOCIATION

Correspondence name and address
	TANIA TOUR-SARKISSIAN
	BANK OF AMERICA N.T. & S.A.
	LEGAL DEPARTMENT #3017
	P.O. BOX 37000
	SAN FRANCISCO, CA 94137

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