Patent Assignment Details
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| Reel/Frame: | 005664/0411 | |
| Pages: | 6 |
| | Recorded: | 04/01/1991 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST. |
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Total properties:
1
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Patent #:
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Issue Dt:
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11/03/1992
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Application #:
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07636867
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Filing Dt:
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01/02/1991
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Title:
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LOW PRESSURE ANISOTROPIC ETCH PROCESS FOR TANTALUM SILICIDE OR TITANIUM SILICIDE LAYER FORMED OVER POLYSILICON LAYER DEPOSITED ON SILICON OXIDE LAYER ON SEMICONDUCTOR WAFER
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Assignee
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| 3050 BOWERS AVENUE |
| SANTA CLARA, CALIFORNIA 95054 |
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Correspondence name and address
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ROBERT J. STERN
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MAIL STOP 0934
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LEGAL AFFAIRS DEPT.
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APPLIED MATERIALS, INC., 3050 BOWERS AVE
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SANTA CLARA, CA 95054
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