Patent Assignment Details
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Reel/Frame: | 005696/0993 | |
| Pages: | 2 |
| | Recorded: | 04/25/1991 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST. |
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Total properties:
1
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Patent #:
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Issue Dt:
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09/14/1993
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Application #:
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07666522
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Filing Dt:
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03/11/1991
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Title:
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PLASMA PROCESSING APPARATUS AND OPERATION METHOD THEREOF
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Assignee
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1-1, TANABESHINDEN, KAWASAKI-KU KAWASAKI-SHI |
KANAGAWA, JAPAN |
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Correspondence name and address
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SPENCER & FRANK
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1111 - 19TH ST., NW
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WASHINGTON, DC 20036
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