Patent Assignment Details
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Reel/Frame: | 005832/0684 | |
| Pages: | 7 |
| | Recorded: | 08/12/1991 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST. |
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Total properties:
1
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Patent #:
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Issue Dt:
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07/14/1992
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Application #:
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07690137
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Filing Dt:
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04/23/1991
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Title:
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METHOD AND APPARATUS TO INHIBIT OBSTRUCTION OF OPTICAL TRANSMISSION THROUGH SEMICONDUCTOR ETCH PROCESS CHAMBER VIEWPORT
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Assignee
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A CORPORATION OF DE |
3050 BOWERS AVENUE |
SANTA CLARA, CALIFORNIA 95054 |
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Correspondence name and address
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ROBERT J. STERN
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MAIL STOP 0934, LEGAL AFFAIRS DEPT.
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APPLIED MATERIALS, INC.
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3050 BOWERS AVE.
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SANTA CLARA, CA 95054
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