Patent Assignment Details
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| Reel/Frame: | 006063/0687 | |
| Pages: | 4 |
| | Recorded: | 03/16/1992 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST. |
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Total properties:
1
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Patent #:
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Issue Dt:
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10/04/1994
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Application #:
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07821447
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Filing Dt:
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01/16/1992
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Title:
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IN SITU METHOD FOR CLEANING SILICON SURFACE AND FORMING LAYER THEREON IN SAME CHAMBER
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Assignee
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| 3050 BOWERS AVENUE |
| SANTA CLARA, CALIFORNIA 95054 |
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Correspondence name and address
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ROBERT J. STERN
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MAIL STOP 0934, LEGAL AFFAIRS DEPT.
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APPLIED MATERIALS, INC.
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3050 BOWERS AVE.
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SANTA CLARA, CA 95054
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