Patent Assignment Details
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| Reel/Frame: | 006202/0088 | |
| Pages: | 3 |
| | Recorded: | 06/26/1992 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST. |
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Total properties:
1
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Patent #:
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Issue Dt:
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05/17/1994
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Application #:
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07874812
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Filing Dt:
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04/28/1992
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Title:
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METHOD AND APPARATUS FOR REAL-TIME WAFER TEMPERATURE AND THIN FILM GROWTH MEASUREMENT AND CONTROL IN A LAMP-HEATED RAPID THERMAL PROCESSOR
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Correspondence name and address
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RICHARD E. JENKINS
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200 SOUTH SQUARE CORPORATE CENTRE II
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3708 MAYFAIR ST.
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DURHAM, NC 27707
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04/28/2024 05:42 PM
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