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Total properties:
15
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Patent #:
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Issue Dt:
|
04/18/1989
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Application #:
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07032474
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Filing Dt:
|
03/31/1987
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Title:
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ROTATABLE SUBSTRATE SUPPORTING MECHANISM WITH TEMPERATURE SENSING DEVICE FOR USE IN CHEMICAL VAPOR DEPOSITION EQUIPMENT
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|
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Patent #:
|
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Issue Dt:
|
03/21/1989
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Application #:
|
07037098
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Filing Dt:
|
04/09/1987
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Title:
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APPARATUS AND METHOD FOR AUTOMATED WAFER HANDLING
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|
|
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Patent #:
|
|
Issue Dt:
|
06/06/1989
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Application #:
|
07063409
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Filing Dt:
|
06/18/1987
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Title:
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HEATING SYSTEM FOR REACTION CHAMBER OF CHEMICAL VAPOR DEPOSITION EQUIPMENT
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|
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Patent #:
|
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Issue Dt:
|
07/11/1989
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Application #:
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07065945
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Filing Dt:
|
06/24/1987
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Title:
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REACTION CHAMBERS FOR CVD SYSTEMS
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Patent #:
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|
Issue Dt:
|
06/22/1993
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Application #:
|
07066019
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Filing Dt:
|
06/24/1987
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Title:
|
IMPROVED GAS INJECTORS FOR REACTION CHAMBERS IN CVD SYSTEMS
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|
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Patent #:
|
|
Issue Dt:
|
05/09/1989
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Application #:
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07108771
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Filing Dt:
|
10/15/1987
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Title:
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CHEMICAL VAPOR DEPOSITION SYSTEM
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|
|
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Patent #:
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|
Issue Dt:
|
03/03/1992
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Application #:
|
07315332
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Filing Dt:
|
02/24/1989
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Title:
|
SUBSTRATE LOADING APPARATUS FOR A CVD PROCESS
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|
|
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Patent #:
|
|
Issue Dt:
|
06/04/1991
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Application #:
|
07315723
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Filing Dt:
|
02/24/1989
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Title:
|
SUBSTRATE HANDLING AND TRANSPORTING APPARATUS
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|
|
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Patent #:
|
|
Issue Dt:
|
12/04/1990
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Application #:
|
07319260
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Filing Dt:
|
03/03/1989
|
|
Title:
|
HEATING SYSTEM FOR SUBSTRATES
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|
|
|
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Patent #:
|
|
Issue Dt:
|
03/17/1992
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Application #:
|
07329778
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Filing Dt:
|
03/28/1989
|
|
Title:
|
METHOD FOR IMPROVING THE REACTANT GAS FLOW IN A REACTION CHAMBERS
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|
|
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|
Patent #:
|
|
Issue Dt:
|
03/05/1991
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Application #:
|
07330200
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Filing Dt:
|
03/29/1989
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Title:
|
ROTATABLE SUBSTRATE SUPPORTING SUSCIPTOR WITH TEMPERATURE SENSORS
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|
|
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Patent #:
|
|
Issue Dt:
|
02/19/1991
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Application #:
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07339310
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Filing Dt:
|
04/17/1989
|
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Title:
|
SUSCEPTOR WITH TEMPERATURE SENSING DEVICE
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|
|
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Patent #:
|
|
Issue Dt:
|
09/03/1991
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Application #:
|
07468630
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Filing Dt:
|
01/23/1990
|
|
Title:
|
APPARATUS FOR IMPROVING THE REACTANT GAS FLOW IN A REACTION CHAMBER
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|
|
|
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Patent #:
|
|
Issue Dt:
|
06/02/1992
|
Application #:
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07539062
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Filing Dt:
|
06/15/1990
|
|
Title:
|
DRIVE SHAFT APPARATUS FOR A SUSCEPTOR
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
01/14/1992
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Application #:
|
07547463
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Filing Dt:
|
07/02/1990
|
|
Title:
|
WAFER HANDLING SYSTEM WITH BERNOULLI PICK-UP
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|
